JPH02140841U - - Google Patents

Info

Publication number
JPH02140841U
JPH02140841U JP5017089U JP5017089U JPH02140841U JP H02140841 U JPH02140841 U JP H02140841U JP 5017089 U JP5017089 U JP 5017089U JP 5017089 U JP5017089 U JP 5017089U JP H02140841 U JPH02140841 U JP H02140841U
Authority
JP
Japan
Prior art keywords
plate
semiconductor device
hook
device processing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5017089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5017089U priority Critical patent/JPH02140841U/ja
Publication of JPH02140841U publication Critical patent/JPH02140841U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP5017089U 1989-04-27 1989-04-27 Pending JPH02140841U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5017089U JPH02140841U (en]) 1989-04-27 1989-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5017089U JPH02140841U (en]) 1989-04-27 1989-04-27

Publications (1)

Publication Number Publication Date
JPH02140841U true JPH02140841U (en]) 1990-11-26

Family

ID=31568491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5017089U Pending JPH02140841U (en]) 1989-04-27 1989-04-27

Country Status (1)

Country Link
JP (1) JPH02140841U (en])

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